Subsurface imaging of flexible circuits via contact resonance atomic force microscopy

• Wenting Wang,
• Chengfu Ma,
• Yuhang Chen,
• Lei Zheng,
• Huarong Liu and
• Jiaru Chu

Beilstein J. Nanotechnol. 2019, 10, 1636–1647, doi:10.3762/bjnano.10.159

• calculations provide a guide to optimizing parameter settings for the nondestructive diagnosis of flexible circuits. Defect detection of the embedded circuit pattern was also carried out, which indicates the capability of imaging tiny subsurface structures smaller than 100 nm by using CR-AFM. Keywords: atomic

• force microscopy (AFM); contact resonance atomic force microscopy (CR-AFM); contact stiffness; defect detection; flexible circuits; subsurface imaging; Introduction With the rapid shrinkage of microelectronic devices, flexible circuits are intensively used while being functionalized as supercapacitors

• the experimental settings. Defect detection To further demonstrate the capability of CR-AFM for imaging tiny subsurface defects in the embedded circuit pattern, we carried out CR-AFM imaging experiments on a specimen which contains well-defined defects with different dimensions. Those defects were